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LEEPL CORP
JP5 patents
Top patents by PatentIndex Score
US6624430B2Sep 23, 2003
Method of measuring and calibrating inclination of electron beam in electron beam proximity exposure apparatus, and electron beam proximity exposure apparatus
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US6727507B2Apr 27, 2004
Electron beam proximity exposure apparatus and method
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US6894295B2May 17, 2005
Electron beam proximity exposure apparatus and mask unit therefor
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US6703623B1Mar 9, 2004
Electron beam proximity exposure apparatus
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US6717157B2Apr 6, 2004
Mask inspecting apparatus
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