Assignee
LEEWIS CHRISTIAN MARINUS
NL·2 granted patents·10 citations·filing 2009–2009
Top patents by PatentIndex Score
2 records- 0185US8891061B2Lithographic focus and dose measurement using a 2-D targetLEEWIS CHRISTIAN MARINUS·Filed 2009·Granted Nov 18, 2014·10 cites·18 claims
- 0251US8848195B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a property of a substrateLEEWIS CHRISTIAN MARINUS·Filed 2009·Granted Sep 30, 2014·0 cites·24 claims
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