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LEFEVRE PAUL
US6 patents
Top patents by PatentIndex Score
US8172648B2May 8, 2012
Chemical-mechanical planarization pad
LEFEVRE PAUL13 citations82
US8684794B2Apr 1, 2014
Chemical mechanical planarization pad with void network
LEFEVRE PAUL15 citations81
US8758659B2Jun 24, 2014
Method of grooving a chemical-mechanical planarization pad
LEFEVRE PAUL2 citations60
US8491360B2Jul 23, 2013
Three-dimensional network in CMP pad
LEFEVRE PAUL2 citations60
US8790165B2Jul 29, 2014
Multi-layered chemical-mechanical planarization pad
LEFEVRE PAUL0 citations49
US8435099B2May 7, 2013
Chemical-mechanical planarization pad including patterned structural domains
LEFEVRE PAUL1 citations49