Assignee
LEHMAN KURT
US·2 granted patents·5 citations·filing 2011–2018
Top patents by PatentIndex Score
2 records- 0184US8831767B2Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or toolLEHMAN KURT·Filed 2011·Granted Sep 9, 2014·3 cites·19 claims
- 0266US10905613B2Transfer boardLEHMAN KURT·Filed 2018·Granted Feb 2, 2021·2 cites·4 claims
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