Assignee
LENZ ERIC
US·2 granted patents·1 pending application·36 citations·filing 2005–2011
Top patents by PatentIndex Score
3 records- 0191US8674255B1Apparatus and method for controlling etch uniformityLENZ ERIC·Filed 2005·Granted Mar 18, 2014·23 cites·18 claims
- 0287US8464736B1Reclaim chemistryLENZ ERIC·Filed 2007·Granted Jun 18, 2013·13 cites·16 claims
- 0337US2012260517A1Apparatus and Method for Reducing Substrate Pattern Collapse During Drying OperationsLENZ ERIC·Filed 2011·Application pending·0 cites
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