Assignee
LENZ ERIC H
US·5 granted patents·461 citations·filing 2005–2010
Top patents by PatentIndex Score
5 records- 0198US8562272B2Substrate load and unload mechanisms for high throughputLENZ ERIC H·Filed 2010·Granted Oct 22, 2013·450 cites·14 claims
- 0288US8282698B2Reduction of particle contamination produced by moving mechanisms in a process toolLENZ ERIC H·Filed 2010·Granted Oct 9, 2012·10 cites·35 claims
- 0367USRE43508EPlasma confinement by use of preferred RF return pathLENZ ERIC H·Filed 2005·Granted Jul 17, 2012·1 cites·19 claims
- 0447US9117870B2High throughput cleaner chamberLENZ ERIC H·Filed 2008·Granted Aug 25, 2015·0 cites·19 claims
- 0545US8893642B2Airflow management for low particulate count in a process toolLENZ ERIC H·Filed 2010·Granted Nov 25, 2014·0 cites·17 claims
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