Assignee
LEVESQUE RICHARD A
US·1 granted patent·2 pending applications·15 citations·filing 2010–2010
Top patents by PatentIndex Score
3 records- 0190US8258485B2Source-collector module with GIC mirror and xenon liquid EUV LPP target systemLEVESQUE RICHARD A·Filed 2010·Granted Sep 4, 2012·15 cites·20 claims
- 0234US2012050707A1Source-collector module with GIC mirror and tin wire EUV LPP target systemLEVESQUE RICHARD A·Filed 2010·Application pending·0 cites
- 0333US2012050706A1Source-collector module with GIC mirror and xenon ice EUV LPP target systemLEVESQUE RICHARD A·Filed 2010·Application pending·0 cites
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