Assignee
LFE CORP
13 patents
Top patents by PatentIndex Score
US4362632ADec 7, 1982
Gas discharge apparatus
LFE CORP167 citations99
US4286470ASep 1, 1981
Clamp-on ultrasonic transducer
LFE CORP82 citations96
US4028155AJun 7, 1977
Process and material for manufacturing thin film integrated circuits
LFE CORP56 citations96
US4353777AOct 12, 1982
Selective plasma polysilicon etching
LFE CORP44 citations92
US3951709AApr 20, 1976
Process and material for semiconductor photomask fabrication
LFE CORP50 citations92
US4505782AMar 19, 1985
Plasma reactive ion etching of aluminum and aluminum alloys
LFE CORP38 citations87
US4066037AJan 3, 1978
Apparatus for depositing dielectric films using a glow discharge
LFE CORP21 citations82
US4526670AJul 2, 1985
Automatically loadable multifaceted electrode with load lock mechanism
LFE CORP29 citations80
US3951843AApr 20, 1976
Fluorocarbon composition for use in plasma removal of photoresist material from semiconductor devices
LFE CORP10 citations74
US3930913AJan 6, 1976
Process for manufacturing integrated circuits and metallic mesh screens
LFE CORP13 citations74
US3962559AJun 8, 1976
Temperature control circuit and oven
LFE CORP13 citations59
US4498354AFeb 12, 1985
Automatic lock for two mode piston pump
LFE CORP4 citations45
US3952249AApr 20, 1976
Edgewise meter assembly
LFE CORP3 citations45