Assignee
LG SILTRON INC
KR·25 granted patents·20 pending applications·21 citations·filing 2010–2017
Top patents by PatentIndex Score
45 records- 0185US8980673B2Solar cell and method of manufacturing the sameLG SILTRON INC·Filed 2014·Granted Mar 17, 2015·3 cites·7 claims
- 0280US9721817B2Apparatus for measuring impurities on wafer and method of measuring impurities on waferLG SILTRON INC·Filed 2016·Granted Aug 1, 2017·2 cites·6 claims
- 0378US10256368B2Semiconductor substrate for controlling a strainLG SILTRON INC·Filed 2013·Granted Apr 9, 2019·4 cites·22 claims
- 0477US8354289B2Method for manufacturing gallium nitride waferLG SILTRON INC·Filed 2011·Granted Jan 15, 2013·3 cites·8 claims
- 0572US10145024B2Cooling rate control apparatus and ingot growing apparatus including sameLG SILTRON INC·Filed 2014·Granted Dec 4, 2018·1 cites·10 claims
- 0672US9153450B2Method for manufacturing gallium nitride waferLG SILTRON INC·Filed 2012·Granted Oct 6, 2015·2 cites·9 claims
- 0770US9994969B2View port for observing ingot growth process and ingot growth apparatus including sameLG SILTRON INC·Filed 2014·Granted Jun 12, 2018·1 cites·14 claims
- 0869US10343257B2Wafer grinding deviceLG SILTRON INC·Filed 2014·Granted Jul 9, 2019·2 cites·5 claims
- 0964US9904994B2Method and apparatus for analyzing shape of waferLG SILTRON INC·Filed 2014·Granted Feb 27, 2018·1 cites·18 claims
- 1062US9724800B2Wafer polishing apparatusLG SILTRON INC·Filed 2015·Granted Aug 8, 2017·1 cites·18 claims
- 1157US2016208408A1Upper heat shielding body, ingot growing apparatus having the same and ingot growing method using the sameLG SILTRON INC·Filed 2014·Application pending·0 cites
- 1257US2015014754A1Image sensor and method for manufacturing the sameLG SILTRON INC·Filed 2012·Application pending·0 cites
- 1355US9657411B2Single-crystal growth apparatusLG SILTRON INC·Filed 2013·Granted May 23, 2017·0 cites·16 claims
- 1454US9583575B2Semiconductor substrateLG SILTRON INC·Filed 2014·Granted Feb 28, 2017·0 cites·20 claims
- 1554US9534314B2Single crystal ingot, apparatus and method for manufacturing the sameLG SILTRON INC·Filed 2013·Granted Jan 3, 2017·1 cites·12 claims
- 1654US2016145766A1Epitaxial reactorLG SILTRON INC·Filed 2014·Application pending·0 cites
- 1753US2016222543A1Heat shield body and silicon monocrystral ingot manufacturing device comprising sameLG SILTRON INC·Filed 2014·Application pending·0 cites
- 1852US9358666B2Slurry supply device and polishing apparatus including the sameLG SILTRON INC·Filed 2014·Granted Jun 7, 2016·0 cites·20 claims
- 1952US2016194784A1Epitaxial reactorLG SILTRON INC·Filed 2014·Application pending·0 cites
- 2052US2015147258A1Single crystal silicon ingot and wafer, and apparatus and method for growing said ingotLG SILTRON INC·Filed 2013·Application pending·0 cites
- 2152US2016273128A1Epitaxial wafer growth apparatusLG SILTRON INC·Filed 2014·Application pending·0 cites
- 2249US9905656B2Semiconductor substrateLG SILTRON INC·Filed 2017·Granted Feb 27, 2018·0 cites·10 claims
- 2349US9777395B2Silicon single crystal growing device and method of growing the sameLG SILTRON INC·Filed 2014·Granted Oct 3, 2017·0 cites·10 claims
- 2449US9406528B2Silicon single crystal wafer, manufacturing method thereof and method of detecting defectsLG SILTRON INC·Filed 2013·Granted Aug 2, 2016·0 cites·11 claims
- 2547US9917022B2Silicon single crystal wafer, manufacturing method thereof and method of detecting defectsLG SILTRON INC·Filed 2016·Granted Mar 13, 2018·0 cites·10 claims
- 2647US9592584B2Plate and dual side wafer grinding device including sameLG SILTRON INC·Filed 2014·Granted Mar 14, 2017·0 cites·14 claims
- 2747US2015197874A1Device for growing monocrystalline silicon and method for manufacturing the sameLG SILTRON INC·Filed 2013·Application pending·0 cites
- 2846US9576807B2Wafer polishing apparatus and methodLG SILTRON INC·Filed 2013·Granted Feb 21, 2017·0 cites·20 claims
- 2946US2016208406A1Crucible and ingot growing device comprising sameLG SILTRON INC·Filed 2014·Application pending·0 cites
- 3042US2016160388A1Silicon single crystal ingot and wafer for semiconductorLG SILTRON INC·Filed 2014·Application pending·0 cites
- 3141US2014311675A1Single wafer etching apparatusLG SILTRON INC·Filed 2012·Application pending·0 cites
- 3240US2014331914A1Apparatus for growing ingot and method of growing ingotLG SILTRON INC·Filed 2012·Application pending·0 cites
- 3339US2015275395A1Susceptor for epitaxial growing and method for epitaxial growingLG SILTRON INC·Filed 2013·Application pending·0 cites
- 3438US10214834B2Monocrystal growth system and method capable of controlling shape of ingot interfaceLG SILTRON INC·Filed 2015·Granted Feb 26, 2019·0 cites·17 claims
- 3538US2017226660A1Seed chuck and ingot growing apparatus including sameLG SILTRON INC·Filed 2015·Application pending·0 cites
- 3637US9857319B2Method of measuring depth of damage of waferLG SILTRON INC·Filed 2014·Granted Jan 2, 2018·0 cites·20 claims
- 3737US2013001846A1Cassette jig for wafer cleaning apparatus and cassette assembly having the sameLG SILTRON INC·Filed 2010·Application pending·0 cites
- 3836US10385472B2Control system and control method for diameter of single crystal ingotLG SILTRON INC·Filed 2015·Granted Aug 20, 2019·0 cites·9 claims
- 3935US2017362736A1Apparatus and method for growing silicon single crystal ingotLG SILTRON INC·Filed 2015·Application pending·0 cites
- 4034US9744641B2Wafer polishing apparatusLG SILTRON INC·Filed 2015·Granted Aug 29, 2017·0 cites·17 claims
- 4129US10255669B2Defect measuring device for wafersLG SILTRON INC·Filed 2015·Granted Apr 9, 2019·0 cites·11 claims
- 4225US2014364041A1Apparatus and method for polishing waferLG SILTRON INC·Filed 2012·Application pending·0 cites
- 4324US2017370020A1Method for preparing restart of reactor for epitaxial growth on waferLG SILTRON INC·Filed 2015·Application pending·0 cites
- 4424US2017370021A1Method of preparing for re-operation of reactor for growing epitaxial waferLG SILTRON INC·Filed 2015·Application pending·0 cites
- 4523US2015368795A1Inlet and reacting system having the sameLG SILTRON INC·Filed 2013·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →