Assignee
LI SHOUTIAN
US4 patents
Top patents by PatentIndex Score
US8252687B2Aug 28, 2012
Barrier slurry for low-k dielectrics
LI SHOUTIAN29 citations91
US9951054B2Apr 24, 2018
CMP porous pad with particles in a polymeric matrix
LI SHOUTIAN15 citations77
US8591763B2Nov 26, 2013
Halide anions for metal removal rate control
LI SHOUTIAN4 citations60
US8551202B2Oct 8, 2013
Iodate-containing chemical-mechanical polishing compositions and methods
LI SHOUTIAN0 citations51