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LI YOUMING
US6 patents
Top patents by PatentIndex Score
US9437802B2Sep 6, 2016
Multi-layered thin film piezoelectric devices and methods of making the same
LI YOUMING7 citations82
US8066857B2Nov 29, 2011
Shaped anode and anode-shield connection for vacuum physical vapor deposition
LI YOUMING9 citations82
US8164234B2Apr 24, 2012
Sputtered piezoelectric material
LI YOUMING3 citations61
US8557088B2Oct 15, 2013
Physical vapor deposition with phase shift
LI YOUMING0 citations51
US8540851B2Sep 24, 2013
Physical vapor deposition with impedance matching network
LI YOUMING1 citations51
US9181619B2Nov 10, 2015
Physical vapor deposition with heat diffuser
LI YOUMING0 citations40