Assignee
LI ZILAN
SG·3 granted patents·14 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0186US8840726B2Apparatus for thin-film depositionLI ZILAN·Filed 2011·Granted Sep 23, 2014·7 cites·14 claims
- 0278US9279185B2Feed-through apparatus for a chemical vapour deposition deviceLI ZILAN·Filed 2012·Granted Mar 8, 2016·3 cites·15 claims
- 0363US9024299B2Method for fabricating a dual work function semiconductor device and the device made thereofLI ZILAN·Filed 2009·Granted May 5, 2015·4 cites·11 claims
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