Assignee
LIGHTWIND CORP
US10 patents
Top patents by PatentIndex Score
US6867859B1Mar 15, 2005
Inductively coupled plasma spectrometer for process diagnostics and control
LIGHTWIND CORP445 citations98
US6538734B2Mar 25, 2003
Method and device utilizing real-time gas sampling
LIGHTWIND CORP18 citations92
US7072028B2Jul 4, 2006
Method and apparatus for chemical monitoring
LIGHTWIND CORP16 citations91
US7202946B2Apr 10, 2007
Method and device utilizing plasma source for real-time gas sampling
LIGHTWIND CORP13 citations89
US6791692B2Sep 14, 2004
Method and device utilizing plasma source for real-time gas sampling
LIGHTWIND CORP22 citations89
US7580119B2Aug 25, 2009
Method and apparatus for chemical monitoring
LIGHTWIND CORP5 citations72
US7019829B2Mar 28, 2006
Method and device utilizing plasma source for real-time gas sampling
LIGHTWIND CORP10 citations71
US7217371B2May 15, 2007
Optical control interface between controller and process chamber
LIGHTWIND CORP3 citations62
US6757061B2Jun 29, 2004
Method and device utilizing real-time gas sampling
LIGHTWIND CORP4 citations62
US7456939B2Nov 25, 2008
Method and apparatus for chemical monitoring
LIGHTWIND CORP4 citations61