Assignee
LIM KWON TAEK
KR·1 granted patent·1 pending application·3 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0165US8889563B2Method and apparatus for etching the silicon oxide layer of a semiconductor substrateLIM KWON-TAEK·Filed 2011·Granted Nov 18, 2014·3 cites·8 claims
- 0242US2011117752A1Method and system for etching a silicon dioxide film using densified carbon dioxideLIM KWON TAEK·Filed 2009·Application pending·0 cites
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