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LIN BURN JENG
TW8 patents
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US9046789B2Jun 2, 2015
Immersion lithography system using a sealed wafer bath
LIN BURN JENG12 citations92
US8767178B2Jul 1, 2014
Immersion lithography system using direction-controlling fluid inlets
LIN BURN JENG21 citations92
US8208116B2Jun 26, 2012
Immersion lithography system using a sealed wafer bath
LIN BURN JENG17 citations92
US8762899B2Jun 24, 2014
Method for metal correlated via split for double patterning
LIN BURN JENG4 citations73
US9330933B2May 3, 2016
Method and apparatus for planarizing a polymer layer
LIN BURN JENG0 citations52
US8179516B2May 15, 2012
Protective layer on objective lens for liquid immersion lithography applications
LIN BURN JENG0 citations52
US8688254B2Apr 1, 2014
Multiple tools using a single data processing unit
LIN BURN JENG0 citations42
US8563198B2Oct 22, 2013
Device and method for providing wavelength reduction with a photomask
LIN BURN JENG0 citations41