Assignee
LIN CHENG-MING
TW3 patents
Top patents by PatentIndex Score
US8268541B2Sep 18, 2012
Mask and blank storage inner gas
LIN CHENG-MING6 citations71
US8792078B2Jul 29, 2014
Method and pellicle mounting apparatus for reducing pellicle induced distortion
LIN CHENG-MING1 citations49
US8158015B2Apr 17, 2012
Fitting methodology of etching times determination for a mask to provide critical dimension and phase control
LIN CHENG-MING0 citations49