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LINDE INC
US3 patents
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US7514119B2Apr 7, 2009
Method and apparatus for using solution based precursors for atomic layer deposition
LINDE INC16 citations78
US7632475B2Dec 15, 2009
Process for removing contaminants from gas streams
LINDE INC15 citations72
US7484372B2Feb 3, 2009
Multi-bath apparatus and method for cooling superconductors
LINDE INC4 citations60