Assignee
LITEL INSTR INC
US·69 granted patents·2,491 citations·filing 1990–2015
Top patents by PatentIndex Score
69 records- 0197US5978085AApparatus method of measurement and method of data analysis for correction of optical systemLITEL INSTR INC·Filed 1997·Granted Nov 2, 1999·189 cites·19 claims
- 0297US5828455AApparatus, method of measurement, and method of data analysis for correction of optical systemLITEL INSTR INC·Filed 1997·Granted Oct 27, 1998·204 cites·9 claims
- 0396US5523543ALaser ablation control system and methodLITEL INSTR INC·Filed 1994·Granted Jun 4, 1996·155 cites·18 claims
- 0495US7381503B2Reference wafer calibration reticleLITEL INSTR INC·Filed 2007·Granted Jun 3, 2008·21 cites·2 claims
- 0595US6573986B2Method and apparatus for self-referenced projection lens distortion mappingLITEL INSTR INC·Filed 2001·Granted Jun 3, 2003·61 cites·43 claims
- 0695US6130009AApparatus and process for nozzle production utilizing computer generated hologramsLITEL INSTR INC·Filed 1994·Granted Oct 10, 2000·95 cites·15 claims
- 0795US5142132AAdaptive optic wafer stepper illumination systemLITEL INSTR INC·Filed 1990·Granted Aug 25, 1992·130 cites·25 claims
- 0894US7286208B2In-situ interferometer arrangementLITEL INSTR INC·Filed 2005·Granted Oct 23, 2007·16 cites·11 claims
- 0994US5362940AUse of Fresnel zone plates for material processingLITEL INSTR INC·Filed 1992·Granted Nov 8, 1994·81 cites·40 claims
- 1093US6356345B1In-situ source metrology instrument and method of useLITEL INSTR INC·Filed 1999·Granted Mar 12, 2002·72 cites·22 claims
- 1192US5202748AIn situ process control system for steppersLITEL INSTR INC·Filed 1991·Granted Apr 13, 1993·88 cites·30 claims
- 1291US9903719B2System and method for advanced navigationLITEL INSTR INC·Filed 2014·Granted Feb 27, 2018·14 cites·10 claims
- 1390US10222178B1Precision geographic location system and method utilizing an image productLITEL INSTR INC·Filed 2015·Granted Mar 5, 2019·8 cites·20 claims
- 1490US7515250B2In-situ interferometer arrangementLITEL INSTR INC·Filed 2007·Granted Apr 7, 2009·8 cites·12 claims
- 1590US5633735AUse of fresnel zone plates for material processingLITEL INSTR INC·Filed 1994·Granted May 27, 1997·62 cites·46 claims
- 1690US5136413AImaging and illumination system with aspherization and aberration correction by phase stepsLITEL INSTR INC·Filed 1990·Granted Aug 4, 1992·75 cites·23 claims
- 1790US5094536ADeformable wafer chuckLITEL INSTR INC·Filed 1990·Granted Mar 10, 1992·147 cites·15 claims
- 1889US5392119APlate correction of imaging systemsLITEL INSTR INC·Filed 1993·Granted Feb 21, 1995·89 cites·30 claims
- 1988US9483816B2Method and system for high accuracy and reliability registration of multi modal imageryLITEL INSTR INC·Filed 2014·Granted Nov 1, 2016·10 cites·19 claims
- 2088US6963390B1In-situ interferometer arrangementLITEL INSTR INC·Filed 2003·Granted Nov 8, 2005·22 cites·4 claims
- 2188US6906780B1Method and apparatus for self-referenced dynamic step and scan intra-field lens distortionLITEL INSTR INC·Filed 2002·Granted Jun 14, 2005·25 cites·25 claims
- 2288US5509553ADirect etch processes for the manufacture of high density multichip modulesLITEL INSTR INC·Filed 1994·Granted Apr 23, 1996·85 cites·50 claims
- 2388US5482801AHigh power phase masks for imaging systemsLITEL INSTR INC·Filed 1994·Granted Jan 9, 1996·49 cites·2 claims
- 2488US5364493AApparatus and process for the production of fine line metal tracesLITEL INSTR INC·Filed 1993·Granted Nov 15, 1994·67 cites·23 claims
- 2588US5328785AHigh power phase masks for imaging systemsLITEL INSTR INC·Filed 1992·Granted Jul 12, 1994·50 cites·5 claims
- 2687US7544449B1Method and apparatus for measurement of crossfield chromatic response of projection imaging systemsLITEL INSTR INC·Filed 2005·Granted Jun 9, 2009·9 cites·31 claims
- 2787US7136144B2Method and apparatus for self-referenced dynamic step and scan intra-field lens distortionLITEL INSTR INC·Filed 2005·Granted Nov 14, 2006·9 cites·15 claims
- 2885US7271905B2Method and apparatus for self-referenced wafer stage positional error mappingLITEL INSTR INC·Filed 2004·Granted Sep 18, 2007·19 cites·5 claims
- 2984US7598006B1Method and apparatus for embedded encoding of overlay data ordering in an in-situ interferometerLITEL INSTR INC·Filed 2005·Granted Oct 6, 2009·7 cites·7 claims
- 3083US7099011B2Method and apparatus for self-referenced projection lens distortion mappingLITEL INSTR INC·Filed 2003·Granted Aug 29, 2006·21 cites·27 claims
- 3183US6906303B1Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortionLITEL INSTR INC·Filed 2002·Granted Jun 14, 2005·21 cites·21 claims
- 3283US5625471ADual plate holographic imaging technique and masksLITEL INSTR INC·Filed 1994·Granted Apr 29, 1997·56 cites·22 claims
- 3383US5481407AApparatus and process for using Fresnel zone plate array for processing materialsLITEL INSTR INC·Filed 1993·Granted Jan 2, 1996·44 cites·31 claims
- 3482US7283202B2In-situ interferometer arrangementLITEL INSTR INC·Filed 2005·Granted Oct 16, 2007·4 cites·7 claims
- 3582US7268360B2Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortionLITEL INSTR INC·Filed 2005·Granted Sep 11, 2007·9 cites·21 claims
- 3682US7126668B2Apparatus and process for determination of dynamic scan field curvatureLITEL INSTR INC·Filed 2004·Granted Oct 24, 2006·17 cites·32 claims
- 3782US6741338B2In-situ source metrology instrument and method of useLITEL INSTR INC·Filed 2001·Granted May 25, 2004·21 cites·15 claims
- 3882US5539175AApparatus and process for optically ablated openings having designed profileLITEL INSTR INC·Filed 1994·Granted Jul 23, 1996·42 cites·19 claims
- 3982US5514618AProcess for manufacture of flat panel liquid crystal display using direct laser etchLITEL INSTR INC·Filed 1995·Granted May 7, 1996·55 cites·8 claims
- 4081US7871004B2Method and apparatus for self-referenced wafer stage positional error mappingLITEL INSTR INC·Filed 2007·Granted Jan 18, 2011·4 cites·4 claims
- 4180US7442951B2Reticle for use in rapid determination of average intrafield scanning distortion having transmissivity of a complementary alignment attribute being different than the transmissivity of at least one alignment attributeLITEL INSTR INC·Filed 2007·Granted Oct 28, 2008·4 cites·8 claims
- 4279US7871002B2Method and apparatus for self-referenced wafer stage positional error mappingLITEL INSTR INC·Filed 2006·Granted Jan 18, 2011·5 cites·24 claims
- 4377US7846624B2Systems and methods for determination of focus and telecentricity, amelioration of metrology induced effects and application to determination of precision bossung curvesLITEL INSTR INC·Filed 2007·Granted Dec 7, 2010·4 cites·11 claims
- 4477US6899982B2Method and apparatus for proper ordering of registration dataLITEL INSTR INC·Filed 2004·Granted May 31, 2005·12 cites·17 claims
- 4576US7262398B2Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortionLITEL INSTR INC·Filed 2005·Granted Aug 28, 2007·3 cites·17 claims
- 4674US5501925AHigh power masks and methods for manufacturing sameLITEL INSTR INC·Filed 1994·Granted Mar 26, 1996·27 cites·11 claims
- 4772US5571429AApparatus and process for high speed laminate processing with computer generated hologramsLITEL INSTR INC·Filed 1994·Granted Nov 5, 1996·33 cites·18 claims
- 4870US7697138B2Method and apparatus for determination of source polarization matrixLITEL INSTR INC·Filed 2006·Granted Apr 13, 2010·5 cites·18 claims
- 4970US7160657B2Reference wafer and process for manufacturing sameLITEL INSTR INC·Filed 2004·Granted Jan 9, 2007·20 cites·12 claims
- 5069US7261985B2Process for determination of optimized exposure conditions for transverse distortion mappingLITEL INSTR INC·Filed 2004·Granted Aug 28, 2007·9 cites·53 claims
Showing the top 50 of 69 patent records by PatentIndex Score.
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