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LONG MAOLIN
US6 patents
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US9966236B2May 8, 2018
Powered grid for plasma chamber
LONG MAOLIN13 citations83
US9293353B2Mar 22, 2016
Faraday shield having plasma density decoupling structure between TCP coil zones
LONG MAOLIN8 citations83
US8736175B2May 27, 2014
Current control in plasma processing systems
LONG MAOLIN4 citations72
US9305750B2Apr 5, 2016
Adjusting current ratios in inductively coupled plasma processing systems
LONG MAOLIN2 citations62
US9336996B2May 10, 2016
Plasma processing systems including side coils and methods related to the plasma processing systems
LONG MAOLIN0 citations52
US8742666B2Jun 3, 2014
Radio frequency (RF) power filters and plasma processing systems including RF power filters
LONG MAOLIN0 citations33