Assignee
LPE SPA
IT21 patents
Top patents by PatentIndex Score
US6648974B1Nov 18, 2003
Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction
LPE SPA555 citations96
US7314526B1Jan 1, 2008
Reaction chamber for an epitaxial reactor
LPE SPA32 citations87
US6022412AFeb 8, 2000
Epitaxial reactor, susceptor and gas-flow system
LPE SPA32 citations80
US7153368B2Dec 26, 2006
Susceptor with epitaxial growth control devices and epitaxial reactor using the same
LPE SPA12 citations79
US6579361B2Jun 17, 2003
Chemical vapor deposition epitaxial reactor having two reaction chambers alternatively actuated and actuating method thereof
LPE SPA7 citations72
US11377754B2Jul 5, 2022
Epitaxial deposition reactor with reflector external to the reaction chamber and cooling method of a susceptor and substrates
LPE SPA2 citations70
US10211085B2Feb 19, 2019
Tool for manipulating substrates, manipulation method and epitaxial reactor
LPE SPA2 citations70
US11834753B2Dec 5, 2023
Reactor for epitaxial deposition with a heating inductor with movable turns
LPE SPA0 citations59
US12485458B2Dec 2, 2025
Method for removing layers of silicon carbide, as well as process and apparatus for cleaning epitaxial reactor components
LPE SPA0 citations50
US12195877B2Jan 14, 2025
Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactor
LPE SPA0 citations48
US12522947B2Jan 13, 2026
Treating arrangement with transfer chamber and epitaxial reactor
LPE SPA0 citations47
US12522949B2Jan 13, 2026
Treating arrangement with storage chamber and epitaxial reactor
LPE SPA0 citations47
US12522948B2Jan 13, 2026
Treating arrangement with loading/unloading group and epitaxial reactor
LPE SPA0 citations47
US12435420B2Oct 7, 2025
Reaction chamber for an epitaxial reactor of semiconductor material with non-uniform longitudinal section and reactor
LPE SPA0 citations47
US12371779B2Jul 29, 2025
Reaction chamber comprising a rotating element for the deposition of a semiconductor material
LPE SPA0 citations47
US12331423B2Jun 17, 2025
Reaction chamber for a deposition reactor with interspace and lower closing element and reactor
LPE SPA0 citations47
US12325932B2Jun 10, 2025
Method for CVD deposition of n-type doped silicon carbide and epitaxial reactor
LPE SPA0 citations39
US6991420B2Jan 31, 2006
Tool for handling wafers and epitaxial growth station
LPE SPA0 citations39
US10815585B2Oct 27, 2020
Susceptor with substrate clamped by underpressure, and reactor for epitaxial deposition
LPE SPA0 citations38
US10697087B2Jun 30, 2020
Susceptor with supporting element
LPE SPA0 citations32
US10392723B2Aug 27, 2019
Reaction chamber for epitaxial growth with a loading/unloading device and reactor
LPE SPA0 citations32