Assignee

LU CHANG-SHEN

TW·1 granted patent·1 pending application·8 citations·filing 2011–2012

Technology mixF27D1 H01L1 H10D1 H10P1

Top patents by PatentIndex Score

2 records

0179US9647066B2Dummy FinFET structure and method of making sameLU CHANG-SHEN·Filed 2012·Granted May 9, 2017·8 cites·20 claims
0234US2013130184A1Apparatus and Method for Controlling Wafer TemperatureLU CHANG-SHEN·Filed 2011·Application pending·0 cites

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