Assignee
MACHINE TECHNOLOGY INC
US·21 granted patents·1,934 citations·filing 1976–1990
Top patents by PatentIndex Score
21 records- 0196US4722298AModular processing apparatus for processing semiconductor wafersMACHINE TECHNOLOGY INC·Filed 1986·Granted Feb 2, 1988·658 cites·15 claims
- 0295US4756810ADeposition and planarizing methods and apparatusMACHINE TECHNOLOGY INC·Filed 1986·Granted Jul 12, 1988·152 cites·32 claims
- 0393US4717461ASystem and method for processing workpiecesMACHINE TECHNOLOGY INC·Filed 1986·Granted Jan 5, 1988·396 cites·14 claims
- 0490US5094884AMethod and apparatus for applying a layer of a fluid material on a semiconductor waferMACHINE TECHNOLOGY INC·Filed 1990·Granted Mar 10, 1992·76 cites·21 claims
- 0590US4673456AMicrowave apparatus for generating plasma afterglowsMACHINE TECHNOLOGY INC·Filed 1985·Granted Jun 16, 1987·87 cites·28 claims
- 0688US4852516AModular processing apparatus for processing semiconductor wafersMACHINE TECHNOLOGY INC·Filed 1987·Granted Aug 1, 1989·100 cites·23 claims
- 0788US4062463AAutomated single cassette load mechanism for scrubberMACHINE TECHNOLOGY INC·Filed 1976·Granted Dec 13, 1977·62 cites·17 claims
- 0886US4664935AThin film deposition apparatus and methodMACHINE TECHNOLOGY INC·Filed 1985·Granted May 12, 1987·68 cites·17 claims
- 0983US5114556ADeposition apparatus and method for enhancing step coverage and planarization on semiconductor wafersMACHINE TECHNOLOGY INC·Filed 1989·Granted May 19, 1992·63 cites·31 claims
- 1082US4885075ACooling device for a sputter target and sourceMACHINE TECHNOLOGY INC·Filed 1988·Granted Dec 5, 1989·30 cites·36 claims
- 1182US4711610ABalancing chuckMACHINE TECHNOLOGY INC·Filed 1986·Granted Dec 8, 1987·54 cites·35 claims
- 1276US4856456AApparatus and method for the fluid treatment of a workpieceMACHINE TECHNOLOGY INC·Filed 1988·Granted Aug 15, 1989·49 cites·30 claims
- 1372US4281031AMethod and apparatus for processing workpiecesMACHINE TECHNOLOGY INC·Filed 1979·Granted Jul 28, 1981·28 cites·22 claims
- 1466US4776923APlasma product treatment apparatus and methods and gas transport systems for use thereinMACHINE TECHNOLOGY INC·Filed 1987·Granted Oct 11, 1988·17 cites·16 claims
- 1553US4109337AAutomated two-sided cleaning apparatusMACHINE TECHNOLOGY INC·Filed 1977·Granted Aug 29, 1978·13 cites·14 claims
- 1652US4674521ARinsing apparatus and methodMACHINE TECHNOLOGY INC·Filed 1985·Granted Jun 23, 1987·25 cites·15 claims
- 1748US4519526AMethod and apparatus for dispensing liquidMACHINE TECHNOLOGY INC·Filed 1982·Granted May 28, 1985·10 cites·20 claims
- 1846US4818561AThin film deposition apparatus and methodMACHINE TECHNOLOGY INC·Filed 1987·Granted Apr 4, 1989·13 cites·33 claims
- 1946US4685852AProcess apparatus and method and elevator mechanism for use in connection therewithMACHINE TECHNOLOGY INC·Filed 1985·Granted Aug 11, 1987·17 cites·30 claims
- 2046US4517752ASplash retarderMACHINE TECHNOLOGY INC·Filed 1983·Granted May 21, 1985·9 cites·20 claims
- 2135US4592926AProcessing apparatus and methodMACHINE TECHNOLOGY INC·Filed 1984·Granted Jun 3, 1986·7 cites·27 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →