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MACKH GUNTHER
DE
3 patents
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US8697574B2
Apr 15, 2014
Through substrate features in semiconductor substrates
MACKH GUNTHER
5 citations
71
US8704338B2
Apr 22, 2014
Chip comprising a fill structure
MACKH GUNTHER
0 citations
48
US8809165B2
Aug 19, 2014
Method for fusing a laser fuse and method for processing a wafer
MACKH GUNTHER
1 citations
46