Assignee
MAHONEY LEONARD J
US·1 granted patent·2 pending applications·24 citations·filing 2004–2006
Top patents by PatentIndex Score
3 records- 0189US8545669B2Sensor array for measuring plasma characteristics in plasma processing environmentsMAHONEY LEONARD J·Filed 2005·Granted Oct 1, 2013·24 cites·26 claims
- 0243US2006180570A1Application of in-situ plasma measurements to performance and control of a plasma processing systemMAHONEY LEONARD J·Filed 2006·Application pending·0 cites
- 0335US2006043063A1Electrically floating diagnostic plasma probe with ion property sensorsMAHONEY LEONARD J·Filed 2004·Application pending·0 cites
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