Assignee

MAJOR ANDRAS G

DE2 patents

Top patents by PatentIndex Score

US8164046B2Apr 24, 2012

Illumination system for illuminating a mask in a microlithographic projection exposure apparatus

MAJOR ANDRAS G2 citations57

US9310701B2Apr 12, 2016

Device for guiding electromagnetic radiation into a projection exposure apparatus

MAJOR ANDRAS G0 citations47