Assignee
MARX DAVID S
US·2 granted patents·2 pending applications·7 citations·filing 2006–2011
Top patents by PatentIndex Score
4 records- 0176US9714825B2Wafer shape thickness and trench measurementMARX DAVID S·Filed 2011·Granted Jul 25, 2017·5 cites·19 claims
- 0268US8649016B2System for directly measuring the depth of a high aspect ratio etched feature on a waferMARX DAVID S·Filed 2011·Granted Feb 11, 2014·2 cites·33 claims
- 0343US2007148792A1Wafer measurement system and apparatusMARX DAVID S·Filed 2006·Application pending·0 cites
- 0439US2010321671A1System for directly measuring the depth of a high aspect ratio etched feature on a waferMARX DAVID S·Filed 2009·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when MARX DAVID S files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →