Assignee
MASAKI FUMITARO
JP·1 granted patent·1 pending application·4 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0169US9063277B2Mirror, method of manufacturing the same, exposure apparatus, and device manufacturing methodMASAKI FUMITARO·Filed 2011·Granted Jun 23, 2015·4 cites·13 claims
- 0251US2009141356A1Optical element, and light source unit and exposure apparatus having the sameMASAKI FUMITARO·Filed 2009·Application pending·0 cites
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