Assignee
MASKLESS LITHOGRAPHY INC
US·6 granted patents·145 citations·filing 2003–2008
Top patents by PatentIndex Score
6 records- 0194US7508570B1Gray level method for slim-based optical lithographyMASKLESS LITHOGRAPHY INC·Filed 2007·Granted Mar 24, 2009·27 cites·25 claims
- 0294US7167296B2Continuous direct-write optical lithographyMASKLESS LITHOGRAPHY INC·Filed 2003·Granted Jan 23, 2007·54 cites·43 claims
- 0391US7719753B2Method of operation for SLM-based optical lithography toolMASKLESS LITHOGRAPHY INC·Filed 2007·Granted May 18, 2010·12 cites·25 claims
- 0491US7295362B2Continuous direct-write optical lithographyMASKLESS LITHOGRAPHY INC·Filed 2004·Granted Nov 13, 2007·33 cites·62 claims
- 0590US7639416B2Apparatus for SLM-based optical lithography with gray level capabilityMASKLESS LITHOGRAPHY INC·Filed 2007·Granted Dec 29, 2009·10 cites·24 claims
- 0683US7847938B2Alignment system for optical lithographyMASKLESS LITHOGRAPHY INC·Filed 2008·Granted Dec 7, 2010·9 cites·8 claims
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