Assignee
MASUDA NORIIKI
JP·1 granted patent·1 pending application·38 citations·filing 2007–2008
Top patents by PatentIndex Score
2 records- 0189US8430962B2Gas supply device, substrate processing apparatus and substrate processing methodMASUDA NORIIKI·Filed 2008·Granted Apr 30, 2013·38 cites·20 claims
- 0245US2008078746A1Substrate processing system, gas supply unit, method of substrate processing, computer program, and storage mediumMASUDA NORIIKI·Filed 2007·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →