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MASUYAMA TATSURO
JP13 patents
Top patents by PatentIndex Score
US8574811B2Nov 5, 2013
Resist composition and method for producing resist pattern
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Resist composition and method for producing resist pattern
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US8426106B2Apr 23, 2013
Photoresist composition
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US8173353B2May 8, 2012
Sulfonium compound
MASUYAMA TATSURO4 citations55
US8765357B2Jul 1, 2014
Resin and photoresist composition comprising same
MASUYAMA TATSURO0 citations52
US9428485B2Aug 30, 2016
Salt, photoresist composition and method for producing photoresist pattern
MASUYAMA TATSURO1 citations51
US9051251B2Jun 9, 2015
Salt, photoresist composition and method for producing photoresist pattern
MASUYAMA TATSURO1 citations51
US8475999B2Jul 2, 2013
Compound and photoresist composition containing the same
MASUYAMA TATSURO1 citations51
US9291893B2Mar 22, 2016
Resist composition and method for producing resist pattern
MASUYAMA TATSURO0 citations41
US8900790B2Dec 2, 2014
Photoresist composition
MASUYAMA TATSURO0 citations41
US8530137B2Sep 10, 2013
Photoresist composition
MASUYAMA TATSURO0 citations41
US8304164B2Nov 6, 2012
Photoresist composition
MASUYAMA TATSURO0 citations41
US8173350B2May 8, 2012
Oxime compound and resist composition containing the same
MASUYAMA TATSURO0 citations41