Assignee
MATSUDO TATSUO
JP·7 granted patents·2 pending applications·23 citations·filing 2010–2012
Top patents by PatentIndex Score
9 records- 0185US9070725B2Measuring apparatus and plasma processing apparatusMATSUDO TATSUO·Filed 2012·Granted Jun 30, 2015·7 cites·7 claims
- 0284US8730482B2Method for measuring wear rateMATSUDO TATSUO·Filed 2011·Granted May 20, 2014·8 cites·10 claims
- 0377US8573837B2Temperature measuring apparatus and temperature measuring methodMATSUDO TATSUO·Filed 2012·Granted Nov 5, 2013·5 cites·6 claims
- 0467US8986494B2Plasma processing apparatus and temperature measuring method and apparatus used thereinMATSUDO TATSUO·Filed 2010·Granted Mar 24, 2015·2 cites·9 claims
- 0560US9022645B2Plasma processing apparatus and temperature measuring methodMATSUDO TATSUO·Filed 2012·Granted May 5, 2015·1 cites·6 claims
- 0642US8500326B2Probe for temperature measurement, temperature measuring system and temperature measuring method using the sameMATSUDO TATSUO·Filed 2011·Granted Aug 6, 2013·0 cites·11 claims
- 0742US2012251705A1Temperature controlling method and plasma processing systemMATSUDO TATSUO·Filed 2012·Application pending·0 cites
- 0840US9046417B2Temperature measuring system, substrate processing apparatus and temperature measuring methodMATSUDO TATSUO·Filed 2012·Granted Jun 2, 2015·0 cites·7 claims
- 0940US2012327393A1Temperature measuring apparatus, substrate processing apparatus and temperature measuring methodMATSUDO TATSUO·Filed 2012·Application pending·0 cites
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