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MATSUI HIDEFUMI

JP3 patents

Top patents by PatentIndex Score

US9209010B2Dec 8, 2015

Substrate cleaning method and substrate cleaning device

MATSUI HIDEFUMI2 citations60

US8585831B2Nov 19, 2013

Substrate cleaning method

MATSUI HIDEFUMI3 citations60

US8475602B2Jul 2, 2013

Substrate cleaning method and apparatus

MATSUI HIDEFUMI2 citations60