Assignee
MATSUI HIROYUKI
JP4 patents
Top patents by PatentIndex Score
US9202665B2Dec 1, 2015
Charged particle beam apparatus for removing charges developed on a region of a sample
MATSUI HIROYUKI5 citations71
US8490857B2Jul 23, 2013
Reflow apparatus, a reflow method, and a manufacturing method of a semiconductor device
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US8302843B2Nov 6, 2012
Process for producing semiconductor device and apparatus therefor
MATSUI HIROYUKI2 citations61
US8336756B2Dec 25, 2012
Reflow apparatus, a reflow method, and a manufacturing method of semiconductor device
MATSUI HIROYUKI0 citations51