Assignee
MATSUMIYA TASUKU
JP·3 granted patents·14 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0185US8236477B2Positive resist composition and method of forming resist patternMATSUMIYA TASUKU·Filed 2009·Granted Aug 7, 2012·7 cites·8 claims
- 0281US8404428B2Positive resist composition, method of forming resist pattern using the same, and fluorine-containing polymeric compoundMATSUMIYA TASUKU·Filed 2010·Granted Mar 26, 2013·3 cites·7 claims
- 0367US8487056B2Positive resist composition and method of forming resist patternMATSUMIYA TASUKU·Filed 2012·Granted Jul 16, 2013·4 cites·6 claims
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