Assignee
MATSUMOTO KAZUHISA
JP·2 granted patents·1 pending application·5 citations·filing 2006–2010
Top patents by PatentIndex Score
3 records- 0166US8439051B2Method of substrate processing, substrate processing system, and storage mediumMATSUMOTO KAZUHISA·Filed 2007·Granted May 14, 2013·3 cites·6 claims
- 0264US8425686B2Liquid processing apparatus, liquid processing method, and recording medium having program stored thereinMATSUMOTO KAZUHISA·Filed 2010·Granted Apr 23, 2013·2 cites·6 claims
- 0340US2009038641A1Substrate Cleaning Apparatus, Substrate Cleaning Method, Substrate Processing System, and Storage MediumMATSUMOTO KAZUHISA·Filed 2006·Application pending·0 cites
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