Assignee
MATSUNAGA MASANOBU
JP·3 granted patents·118 citations·filing 2009–2010
Top patents by PatentIndex Score
3 records- 0196US8563096B2Vertical film formation apparatus and method for using sameMATSUNAGA MASANOBU·Filed 2010·Granted Oct 22, 2013·31 cites·13 claims
- 0296US8257789B2Film formation method in vertical batch CVD apparatusMATSUNAGA MASANOBU·Filed 2009·Granted Sep 4, 2012·81 cites·14 claims
- 0382US8216648B2Film formation method and apparatusMATSUNAGA MASANOBU·Filed 2010·Granted Jul 10, 2012·6 cites·3 claims
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