Assignee

MATSUO TADASHI

JP2 patents

Top patents by PatentIndex Score

US8962220B2Feb 24, 2015

Reflective photomask and reflective photomask blank

MATSUO TADASHI6 citations68

US8394558B2Mar 12, 2013

Reflection type photomask blank, manufacturing method thereof, reflection type photomask, and manufacturing method of semiconductor device

MATSUO TADASHI0 citations40