Assignee
MATSUOKA YASUO
JP·2 granted patents·5 pending applications·12 citations·filing 1987–2012
Top patents by PatentIndex Score
7 records- 0188US8560977B2Drop recipe creating method, database creating method and mediumMATSUOKA YASUO·Filed 2011·Granted Oct 15, 2013·8 cites·3 claims
- 0242US2012208327A1Imprint apparatus and manufacturing method of semiconductor substrateMATSUOKA YASUO·Filed 2012·Application pending·0 cites
- 0341US2012129279A1Imprinting method, imprinting apparatus and mediumMATSUOKA YASUO·Filed 2011·Application pending·0 cites
- 0440US2012072003A1Imprinting method, semiconductor integrated circuit manufacturing method and drop recipe creating methodMATSUOKA YASUO·Filed 2011·Application pending·0 cites
- 0537US2012045854A1Inspecting method, template manufacturing method, semiconductor integrated circuit manufacturing method, and inspecting systemMATSUOKA YASUO·Filed 2011·Application pending·0 cites
- 0637US2012196389A1Defect inspection method and manufacturing method of semiconductor deviceMATSUOKA YASUO·Filed 2011·Application pending·0 cites
- 0736US4946764AMethod of forming resist pattern and resist processing apparatus used in this methodMATSUOKA YASUO·Filed 1987·Granted Aug 7, 1990·4 cites·4 claims
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