Assignee
MATTSON TECH INC
US210 patents
Top patents by PatentIndex Score
US7015422B2Mar 21, 2006
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
MATTSON TECH INC98 citations99
US6551447B1Apr 22, 2003
Inductive plasma reactor
MATTSON TECH INC113 citations98
US6253704B1Jul 3, 2001
Apparatus and method for pulsed plasma processing of a semiconductor substrate
MATTSON TECH INC117 citations98
US6200634B1Mar 13, 2001
Thermal processing system with supplemental resistive heater and shielded optical pyrometry
MATTSON TECH INC143 citations98
US6198074B1Mar 6, 2001
System and method for rapid thermal processing with transitional heater
MATTSON TECH INC89 citations98
US6172337B1Jan 9, 2001
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC190 citations98
US6143129ANov 7, 2000
Inductive plasma reactor
MATTSON TECH INC374 citations98
US5983828ANov 16, 1999
Apparatus and method for pulsed plasma processing of a semiconductor substrate
MATTSON TECH INC123 citations98
US5830277ANov 3, 1998
Thermal processing system with supplemental resistive heater and shielded optical pyrometry
MATTSON TECH INC172 citations98
US5811022ASep 22, 1998
Inductive plasma reactor
MATTSON TECH INC282 citations98
US5534231AJul 9, 1996
Low frequency inductive RF plasma reactor
MATTSON TECH INC142 citations98
US10037867B2Jul 31, 2018
Inductive plasma source with high coupling efficiency
MATTSON TECH INC55 citations97
US7642205B2Jan 5, 2010
Rapid thermal processing using energy transfer layers
MATTSON TECH INC57 citations97
US6951996B2Oct 4, 2005
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC84 citations97
US6849831B2Feb 1, 2005
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC135 citations97
US6805139B1Oct 19, 2004
Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing
MATTSON TECH INC138 citations97
US6451713B1Sep 17, 2002
UV pretreatment process for ultra-thin oxynitride formation
MATTSON TECH INC510 citations97
US6342691B1Jan 29, 2002
Apparatus and method for thermal processing of semiconductor substrates
MATTSON TECH INC111 citations97
US6315512B1Nov 13, 2001
Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber
MATTSON TECH INC737 citations97
US6835914B2Dec 28, 2004
Apparatus and method for reducing stray light in substrate processing chambers
MATTSON TECH INC52 citations96
US6794301B2Sep 21, 2004
Pulsed plasma processing of semiconductor substrates
MATTSON TECH INC64 citations96
US6727474B2Apr 27, 2004
Rapid thermal processing chamber for processing multiple wafers
MATTSON TECH INC58 citations96
US6610967B2Aug 26, 2003
Rapid thermal processing chamber for processing multiple wafers
MATTSON TECH INC51 citations96
US6403923B1Jun 11, 2002
System for controlling the temperature of a reflective substrate during rapid heating
MATTSON TECH INC66 citations96
US6301434B1Oct 9, 2001
Apparatus and method for CVD and thermal processing of semiconductor substrates
MATTSON TECH INC133 citations96
US5968279AOct 19, 1999
Method of cleaning wafer substrates
MATTSON TECH INC108 citations96
US5964949AOct 12, 1999
ICP reactor having a conically-shaped plasma-generating section
MATTSON TECH INC67 citations96
US7317870B2Jan 8, 2008
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC46 citations95
US6717158B1Apr 6, 2004
Heating device for heating semiconductor wafers in thermal processing chambers
MATTSON TECH INC74 citations95
US6559424B2May 6, 2003
Windows used in thermal processing chambers
MATTSON TECH INC82 citations95
US6403925B1Jun 11, 2002
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC47 citations95
US6335293B1Jan 1, 2002
Systems and methods for two-sided etch of a semiconductor substrate
MATTSON TECH INC384 citations95
US6046439AApr 4, 2000
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC49 citations95
US6002109ADec 14, 1999
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC80 citations95
US5824604AOct 20, 1998
Hydrocarbon-enhanced dry stripping of photoresist
MATTSON TECH INC91 citations95
US7269343B2Sep 11, 2007
Heating configuration for use in thermal processing chambers
MATTSON TECH INC37 citations94
US6970644B2Nov 29, 2005
Heating configuration for use in thermal processing chambers
MATTSON TECH INC52 citations94
US6835278B2Dec 28, 2004
Systems and methods for remote plasma clean
MATTSON TECH INC62 citations94
US6797312B2Sep 28, 2004
Electroless plating solution and process
MATTSON TECH INC66 citations94
US6771895B2Aug 3, 2004
Heating device for heating semiconductor wafers in thermal processing chambers
MATTSON TECH INC35 citations94
US6647665B1Nov 18, 2003
Door systems for low contamination, high throughput handling of workpieces for vacuum processing
MATTSON TECH INC58 citations94
US6568552B1May 27, 2003
Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
MATTSON TECH INC45 citations94
US10269574B1Apr 23, 2019
Surface treatment of carbon containing films using organic radicals
MATTSON TECH INC12 citations93
US6808758B1Oct 26, 2004
Pulse precursor deposition process for forming layers in semiconductor devices
MATTSON TECH INC29 citations93
US6536449B1Mar 25, 2003
Downstream surface cleaning process
MATTSON TECH INC61 citations93
US6379576B2Apr 30, 2002
Systems and methods for variable mode plasma enhanced processing of semiconductor wafers
MATTSON TECH INC47 citations93
US6331697B2Dec 18, 2001
System and method for rapid thermal processing
MATTSON TECH INC23 citations93
US7957926B2Jun 7, 2011
System and process for calibrating pyrometers in thermal processing chambers
MATTSON TECH INC11 citations92
US7847218B2Dec 7, 2010
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
MATTSON TECH INC13 citations92
US7745762B2Jun 29, 2010
Optimizing the thermal budget during a pulsed heating process
MATTSON TECH INC19 citations92
Showing the top 50 of 210 patents by PatentIndex Score.