Assignee

MATTSON TECHNOLOGY CORP

US·1 granted patent·38 citations·filing 1998–1998

Technology mixC30B1 H10P1

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0164US6449428B2Gas driven rotating susceptor for rapid thermal processing (RTP) systemMATTSON TECHNOLOGY CORP·Filed 1998·Granted Sep 10, 2002·38 cites·11 claims

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