Assignee
MATTSON THERMAL PRODUCTS
DE·2 granted patents·37 citations·filing 2002–2002
Top patents by PatentIndex Score
2 records- 0177US7056389B2Method and device for thermal treatment of substratesMATTSON THERMAL PRODUCTS·Filed 2002·Granted Jun 6, 2006·22 cites·21 claims
- 0264US7144826B2Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environmentMATTSON THERMAL PRODUCTS·Filed 2002·Granted Dec 5, 2006·15 cites·28 claims
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