Assignee
MATTSON THERMAL PRODUCTS GMBH
DE·8 granted patents·50 citations·filing 2001–2003
Top patents by PatentIndex Score
8 records- 0167US7169717B2Method of producing a calibration waferMATTSON THERMAL PRODUCTS GMBH·Filed 2003·Granted Jan 30, 2007·13 cites·20 claims
- 0253US6965093B2Device for thermally treating substratesMATTSON THERMAL PRODUCTS GMBH·Filed 2001·Granted Nov 15, 2005·7 cites·31 claims
- 0352US7098157B2Method and apparatus for thermally treating disk-shaped substratesMATTSON THERMAL PRODUCTS GMBH·Filed 2003·Granted Aug 29, 2006·10 cites·67 claims
- 0452US6775471B2Method and device for thermally treating objectsMATTSON THERMAL PRODUCTS GMBH·Filed 2001·Granted Aug 10, 2004·13 cites·16 claims
- 0549US7151060B2Device and method for thermally treating semiconductor wafersMATTSON THERMAL PRODUCTS GMBH·Filed 2003·Granted Dec 19, 2006·4 cites·34 claims
- 0644US7412299B2Process for determining the temperature of a semiconductor wafer in a rapid heating unitMATTSON THERMAL PRODUCTS GMBH·Filed 2003·Granted Aug 12, 2008·2 cites·42 claims
- 0744US7144747B2Method for thermally treating a substrate that comprises several layersMATTSON THERMAL PRODUCTS GMBH·Filed 2002·Granted Dec 5, 2006·1 cites·16 claims
- 0832US6809011B2Adjusting of defect profiles in crystal or crystalline-like structuresMATTSON THERMAL PRODUCTS GMBH·Filed 2001·Granted Oct 26, 2004·0 cites·54 claims
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