Assignee
MATYUSHKIN ALEXANDER
US3 patents
Top patents by PatentIndex Score
US8226769B2Jul 24, 2012
Substrate support with electrostatic chuck having dual temperature zones
MATYUSHKIN ALEXANDER80 citations96
US9275887B2Mar 1, 2016
Substrate processing with rapid temperature gradient control
MATYUSHKIN ALEXANDER20 citations92
US8663391B2Mar 4, 2014
Electrostatic chuck having a plurality of heater coils
MATYUSHKIN ALEXANDER35 citations92