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MATZ LAURA M
US
3 patents
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US8637396B2
Jan 28, 2014
Dielectric barrier deposition using oxygen containing precursor
MATZ LAURA M
3 citations
60
US8202808B2
Jun 19, 2012
Methods of forming strontium titanate films
MATZ LAURA M
3 citations
60
US8592058B2
Nov 26, 2013
Methods of forming strontium titanate films
MATZ LAURA M
0 citations
49