Assignee
MECS CORP
US·6 granted patents·232 citations·filing 1987–1999
Top patents by PatentIndex Score
6 records- 0180US6234738B1Thin substrate transferring apparatusMECS CORP·Filed 1999·Granted May 22, 2001·69 cites·4 claims
- 0270US5054991AWafer positioning apparatusMECS CORP·Filed 1990·Granted Oct 8, 1991·49 cites·3 claims
- 0367US5365672APositioning apparatus for a semiconductor waferMECS CORP·Filed 1993·Granted Nov 22, 1994·42 cites·8 claims
- 0457US4778331ACarrier system for silicon waferMECS CORP·Filed 1987·Granted Oct 18, 1988·27 cites·3 claims
- 0556US4770600AApparatus for positioning silicon waferMECS CORP·Filed 1987·Granted Sep 13, 1988·23 cites·3 claims
- 0652US4735548ACarrier system for clean roomMECS CORP·Filed 1987·Granted Apr 5, 1988·22 cites·3 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →