Assignee
MEMX INC
US39 patents
Top patents by PatentIndex Score
US6778306B2Aug 17, 2004
Surface micromachined optical system with reinforced mirror microstructure
MEMX INC81 citations98
US6756317B2Jun 29, 2004
Method for making a microstructure by surface micromachining
MEMX INC78 citations98
US6864618B2Mar 8, 2005
Method for operating a microelectromechanical system using a stiff coupling
MEMX INC57 citations96
US6707176B1Mar 16, 2004
Non-linear actuator suspension for microelectromechanical systems
MEMX INC68 citations96
US6640023B2Oct 28, 2003
Single chip optical cross connect
MEMX INC62 citations95
US6844657B2Jan 18, 2005
Microelectromechanical system and method for producing displacement multiplication
MEMX INC20 citations92
US6703675B1Mar 9, 2004
Particle filter for partially enclosed microelectromechanical systems
MEMX INC34 citations92
US6650806B2Nov 18, 2003
Compliant push/pull connector microstructure
MEMX INC21 citations92
US6600587B2Jul 29, 2003
Surface micromachined optical system with reinforced mirror microstructure
MEMX INC31 citations92
US6993818B2Feb 7, 2006
Multi-fixture assembly of cutting tools
MEMX INC25 citations88
US6954348B1Oct 11, 2005
Tunable MEMS capacitor
MEMX INC18 citations84
US6747340B2Jun 8, 2004
Multi-level shielded multi-conductor interconnect bus for MEMS
MEMX INC16 citations84
US6731513B2May 4, 2004
Shielded multi-conductor interconnect bus for MEMS
MEMX INC13 citations84
US6875257B2Apr 5, 2005
Particle filter for microelectromechanical systems
MEMX INC11 citations74
US6824278B2Nov 30, 2004
Self-shadowing MEM structures
MEMX INC6 citations74
US6791730B2Sep 14, 2004
Surface micromachined optical system with reinforced mirror microstructure
MEMX INC9 citations74
US6637901B2Oct 28, 2003
Mirror assembly with elevator lifter
MEMX INC8 citations74
US6847152B2Jan 25, 2005
Microelectromechnical system for tilting a platform
MEMX INC6 citations73
US6831391B2Dec 14, 2004
Microelectromechanical system for tilting a platform
MEMX INC4 citations73
US6665104B2Dec 16, 2003
Mirror positioning assembly with vertical force component compensation
MEMX INC10 citations73
US6937131B2Aug 30, 2005
Self-shadowing MEM structures
MEMX INC3 citations63
US6894420B2May 17, 2005
Non-linear actuator suspension for microelectromechanical systems
MEMX INC5 citations63
US6778305B2Aug 17, 2004
Surface micromachined optical system with reinforced mirror microstructure
MEMX INC2 citations63
US6706619B2Mar 16, 2004
Method for tiling unit cells
MEMX INC2 citations63
US6700173B1Mar 2, 2004
Electrically isolated support for overlying MEM structure
MEMX INC3 citations63
US6621681B2Sep 16, 2003
Low voltage control of MEM actuators
MEMX INC2 citations63
US7055975B2Jun 6, 2006
Microelectromechanical system with non-collinear force compensation
MEMX INC2 citations62
US6989582B2Jan 24, 2006
Method for making a multi-die chip
MEMX INC4 citations62
US6944365B2Sep 13, 2005
Off axis optical signal redirection architectures
MEMX INC4 citations62
US6841464B2Jan 11, 2005
Multi-level shielded multi-conductor interconnect bus for MEMS
MEMX INC2 citations62
US6831390B2Dec 14, 2004
Microelectromechanical system with stiff coupling
MEMX INC2 citations62
US6794793B2Sep 21, 2004
Microelectromechnical system for tilting a platform
MEMX INC1 citations62
US6791162B2Sep 14, 2004
Unit cell architecture for electrical interconnects
MEMX INC2 citations62
US6774535B2Aug 10, 2004
Micromechanical platform pivotal on a compliant member
MEMX INC2 citations62
US6727436B2Apr 27, 2004
Interconnect bus crossover for MEMS
MEMX INC4 citations62
US6707077B2Mar 16, 2004
Chip interconnect bus
MEMX INC4 citations62
US6813057B2Nov 2, 2004
Configurations for an optical crossconnect switch
MEMX INC2 citations60
US6808275B2Oct 26, 2004
Mirror assembly with elevator lifter
MEMX INC1 citations52
US6919616B2Jul 19, 2005
Chip with passive electrical contacts
MEMX INC0 citations41