Assignee
MERRY NIR
US5 patents
Top patents by PatentIndex Score
US8894344B2Nov 25, 2014
Vertical wafer buffering system
MERRY NIR38 citations93
US8150242B2Apr 3, 2012
Use of infrared camera for real-time temperature monitoring and control
MERRY NIR14 citations82
US8724976B2May 13, 2014
Use of infrared camera for real-time temperature monitoring and control
MERRY NIR3 citations60
US8425977B2Apr 23, 2013
Substrate processing chamber with off-center gas delivery funnel
MERRY NIR0 citations51
US8419855B2Apr 16, 2013
Substrate processing chamber with off-center gas delivery funnel
MERRY NIR0 citations51