Assignee
METAL PROCESS SARL
FR·4 granted patents·167 citations·filing 1992–2000
Top patents by PatentIndex Score
4 records- 0192US6407359B1Method of producing individual plasmas in order to create a uniform plasma for a work surface, and apparatus for producing such a plasmaMETAL PROCESS SARL·Filed 2000·Granted Jun 18, 2002·71 cites·13 claims
- 0276US5216329ADevice for distributing a microwave energy for exciting a plasmaMETAL PROCESS SARL·Filed 1992·Granted Jun 1, 1993·55 cites·10 claims
- 0373US5536914ADevice for exciting a plasma to electron cyclotron resonance by means of a wire applicator of a static magnetic field and of a microwave fieldMETAL PROCESS SARL·Filed 1994·Granted Jul 16, 1996·31 cites·12 claims
- 0454US6403490B1Method of producing a plasma by capacitive-type discharges with a multipole barrier, and apparatus for implementing such a methodMETAL PROCESS SARL·Filed 2000·Granted Jun 11, 2002·10 cites·6 claims
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