Assignee
METROSOL INC
US18 patents
Top patents by PatentIndex Score
US7067818B2Jun 27, 2006
Vacuum ultraviolet reflectometer system and method
METROSOL INC67 citations98
US7126131B2Oct 24, 2006
Broad band referencing reflectometer
METROSOL INC52 citations96
US7684037B2Mar 23, 2010
Spectrometer with collimated input light
METROSOL INC28 citations92
US7485869B2Feb 3, 2009
Prism spectrometer
METROSOL INC28 citations92
US7446876B2Nov 4, 2008
Vacuum ultra-violet reflectometer with stray light correction
METROSOL INC11 citations92
US7399975B2Jul 15, 2008
Method and apparatus for performing highly accurate thin film measurements
METROSOL INC19 citations92
US7394551B2Jul 1, 2008
Vacuum ultraviolet referencing reflectometer
METROSOL INC25 citations92
US7391030B2Jun 24, 2008
Broad band referencing reflectometer
METROSOL INC19 citations92
US7271394B2Sep 18, 2007
Vacuum ultraviolet reflectometer having collimated beam
METROSOL INC19 citations92
US7189973B2Mar 13, 2007
Vacuum ultraviolet reflectometer integrated with processing system
METROSOL INC26 citations92
US7026626B2Apr 11, 2006
Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer
METROSOL INC38 citations92
US7342235B1Mar 11, 2008
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC32 citations91
US7511265B2Mar 31, 2009
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC11 citations84
US7282703B2Oct 16, 2007
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC17 citations84
US7579601B2Aug 25, 2009
Spectrometer with moveable detector element
METROSOL INC16 citations83
US7663097B2Feb 16, 2010
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC4 citations62
US7663747B2Feb 16, 2010
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC2 citations61
US7622310B2Nov 24, 2009
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC2 citations61