Assignee
MICHALOSKI PAUL FRANCIS
US·4 granted patents·4 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0175US8724203B2Variable pulse stretching length by variable beamsplitter reflectivityMICHALOSKI PAUL FRANCIS·Filed 2011·Granted May 13, 2014·4 cites·18 claims
- 0251US8525972B2Optimization of focused spots for maskless lithographyMICHALOSKI PAUL FRANCIS·Filed 2009·Granted Sep 3, 2013·0 cites·23 claims
- 0348US8421997B2Active spot array lithographic projector system with regulated spotsMICHALOSKI PAUL FRANCIS·Filed 2009·Granted Apr 16, 2013·0 cites·21 claims
- 0439US8755122B2Laser pulse stretching unit and method for using sameMICHALOSKI PAUL FRANCIS·Filed 2011·Granted Jun 17, 2014·0 cites·29 claims
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